PS探针台系列微纳米操纵机械手
PS（probe shuttle）系列微纳米操纵仪是最新为装有空气锁（Air-Lock）的扫描及双束电镜设计的，微纳米操纵仪可以像扫描电镜样品一样经过预抽后进入到扫描电镜中，从而在不打开电镜舱门的情况下进行样品或探针更换。
此系列分为科研和半导体用两类，一般科研用仅操纵仪及相关的适配托盘平台即可（PS4）。
PS4可以根据需要配备2-4个MM4新一代微纳米操纵仪即：PS2、PS3、PS4。
Technical specifications
Dimensions Prober Shuttle Platform
ƒ Diameter 100 mm
ƒ Height 10 mm
Substage
ƒ Travel X and Y 9 mm
ƒ Travel Z 0.7 mm
Probers
ƒ Travel X 9 mm
ƒ Travel Y 5 mm
ƒ Travel Z 90 deg
All axes
ƒ Resolution
Linear axes < 0.5 nm
Rotational axes < 5 nm
ƒ Speed up to 1 mm/s
ƒ Drift < 1 nm/min
ƒ Cartesian movement
ƒ No backlash or reversal play
ƒ Coarse and fine displacement in one drive
Low Current Measurement
ƒ Noise: 20 fA @ 1 Hz
ƒ Insulation leakage current (probes): <50 fA / V
ƒ Insulation leakage current (sample): <150 fA / V
ƒ Signal conductor resistance: <5 Ω
ƒ Maximum voltage: 100 V
ƒ Maximum current: 100 mA
System features
ƒ Probing at FIB tilt for circuit edit applications
ƒ Non-magnetic design
ƒ Load lock compatible for fast cycle time
Probe-station对于要求稳定性很高的半导体厂测量电流用做探针台（Probe-station）时，PS系列的产品一般还要配备一个XYZ三方向的高精度移动子台及辅助增加稳定性的热温度控制。并且根据测量晶体管相关参数的需要配置LCT等相关软硬件配置（PW8）。
一般半导体厂家可以根据需要配置４个／６个／８个MM４微纳米操纵仪即PW8.4/PW6和PW８。
Technical specifications
Dimensions Prober Shuttle Platform
ƒ Diameter 140 mm
ƒ Height 10 mm
Substage
ƒ Travel X and Y 9 mm
ƒ Travel Z 0.7 mm
Probers
ƒ Travel X 4.5 mm
ƒ Travel Y 5 mm
ƒ Travel Z 90 deg
All axes
ƒ Resolution
Linear axes < 0.5 nm
Rotational axes < 8 nm
ƒ Speed up to 1 mm/s
ƒ Drift < 1 nm/min
ƒ Cartesian movement
ƒ No backlash or reversal play
ƒ Coarse and fine displacement in one drive
Measurement sensitivity
ƒ Noise: 20 fA @ 1 Hz
ƒ Insulation leakage current (probes): <50 fA / V
ƒ Insulation leakage current (sample): <150 fA / V
ƒ Signal conductor resistance: <5 Ω
ƒ Maximum voltage: 100 V
ƒ Maximum current: 100 mA
System features
ƒ All air side hardware mounted in 19” rack
ƒ Electronics rack outside of operator’s view
ƒ The entire system is controlled via the APT UI
ƒ Clean cable management from flange to rack
ƒ Probing at FIB tilt for circuit edit applications
ƒ Non-magnetic design
ƒ Ready for 7 nm and beyond
